| 摘要 |
A workpiece processing system may be provided which includes an installation having a plurality of process units integrated such that the units are reconfigurable on unit-by-unit basis, and also includes a loader that transfers a workpiece. Each of the units has one or more positioning point for the loader, at which the loader may be positioned by a controller. Each one of the units includes a marker indicating a reference point in the each one of the units. A reader in the loader reads the marker to determine a location of the reference point. The controller includes memories which store a relative location of the positioning point(s) and the location of the reference point determined by the reader in the each one of the units. |
