| 摘要 |
<p>The present invention relates to a method for manufacturing a retainer ring structure for chemical-mechanical polishing (CMP), which uses a high-strength metal material for screw areas, which fix the retainer ring structure that is coupled to a polishing head during a CMP process, and simplifies the method for manufacturing the retainer ring structure, thereby reducing product defect rates by increasing coupling force with the polishing head, reducing working time and unit cost by simplifying the process, and thus effectively increasing salability.</p> |
