ARC MANAGEMENT WITH VOLTAGE REVERSAL AND IMPROVED RECOVERY
摘要
Systems and methods for arc handling in plasma processing operations are disclosed. The method includes providing current with a power supply to a plasma load at a first voltage polarity and energizing an energy storage device so when it is energized, the energy storage device applies a reverse polarity voltage that has a magnitude that is as least as great as the first voltage polarity. When an arc is detected, power is applied from the energy storage device to the plasma load with a reverse polarity voltage that has a polarity that is opposite of the first voltage polarity, the application of the reverse polarity voltage to the plasma load decreases a level of the current that is provided to the plasma load.
申请公布号
WO2014036169(A1)
申请公布日期
2014.03.06
申请号
WO2013US57130
申请日期
2013.08.28
申请人
ADVANCED ENERGY INDUSTRIES, INC.
发明人
WALDE, HENDRIK;PANKRATZ, JOSHUA, BRIAN;CHRISTIE, DAVID;KOWAL, BRIAN, D.