发明名称 SEMICONDUCTOR DEVICE INCORPORATING A MULTI-FUNCTION LAYER INTO GATE STACKS
摘要 Approaches are provided for forming a semiconductor device (e.g., a FET) having a multi-function layer (e.g., niobium carbide (NbC)) that serves as a work function layer and a gate metal layer in gate stacks of solid state applications. By introducing a single layer with multiple functions, total number of layers that needs processing (e.g., recessing) may be decreased. As such, the complexity of device integration and resulting complications may be reduced.
申请公布号 US2014061812(A1) 申请公布日期 2014.03.06
申请号 US201213602839 申请日期 2012.09.04
申请人 DENIZ DERYA;GLOBALFOUNDRIES INC. 发明人 DENIZ DERYA
分类号 H01L21/28;H01L27/092 主分类号 H01L21/28
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