发明名称 A device and method for inhibiting oxidation of contact plugs in ferroelectric capacitor devices
摘要 <p>A ferroelectric capacitor device and method for producing such a device comprises forming a substrate, and forming a contact plug passing through the substrate. An electrically insulating layer is formed on the substrate, and a first electrode is formed on the electrically insulating layer. A ferroelectric layer is formed on the first electrode and a second electrode is formed on the ferroelectric layer. The first electrode is then electrically connected to the plug through the electrically insulating layer.</p>
申请公布号 EP1680807(B1) 申请公布日期 2014.03.05
申请号 EP20040775612 申请日期 2004.09.09
申请人 QIMONDA AG 发明人 LIAN, JINGYU
分类号 H01L21/02;H01L21/00;H01L21/768;H01L21/8246;H01L27/115;H01L29/76 主分类号 H01L21/02
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