| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actinic ray-sensitive or radiation-sensitive resin composition that suppresses occurrence of development defects and has excellent exposure latitude and line edge roughness performance. <P>SOLUTION: The actinic ray-sensitive or radiation-sensitive resin composition contains (A) a compound generating an acid by irradiation with actinic rays or radiation, (B) a resin showing an increase in dissolution rate with an alkali developing solution by an action of an acid, and (C) a hydrophobic resin. The compound (A) generating an acid by irradiation with actinic rays or radiation is represented by general formula (1). <P>COPYRIGHT: (C)2010,JPO&INPIT |
