发明名称 |
SCANNING PROBE MICROSCOPE WITH COMPACT SCANNER |
摘要 |
<p>A scanner for a scanning probe microscope (SPM) including a head has a scanner body that houses an actuator, and a sensor that detects scanner movement. The scanner body is removable from the head by hand and without the use of tools and has a total volume of less than about five (5) square inches. Provisions are made for insuring that movement of a probe device coupled to the scanner is restricted to be substantially only in the intended direction. A fundamental resonance frequency for the scanner can be greater than 10 kHz.</p> |
申请公布号 |
EP2702416(A2) |
申请公布日期 |
2014.03.05 |
申请号 |
EP20120776119 |
申请日期 |
2012.04.27 |
申请人 |
BRUKER NANO, INC. |
发明人 |
PHAN, NGHI;MARKAKIS, JEFF;KINDT, JOHANNES;MASSER, CARL |
分类号 |
G01Q70/02 |
主分类号 |
G01Q70/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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