| 摘要 |
<p>The present invention relates a device for feeding the raw materials of a linear evaporation source, capable of replacing a crucible under vacuum pressures and depositing organic matters for a long time, and a thin film depositing device with the raw material feeding device. The device for feeding the raw materials of a linear evaporation source comprises: a crucible feeding part having crucible insertion grooves radially formed to insert crucibles for storing raw materials, and feeding the crucibles to a vacuum chamber one by one while rotating on a rotary shaft; a crucible lifting device for ascending or descending the crucibles so that one of the crucibles inserted in the crucible insertion grooves can be entered into the vacuum chamber or the crucibles from which the raw material substances are burned out can be drawn out from the vacuum chamber; a crucible guide installed at the bottom of an inlet to guide the crucibles entered into the vacuum chamber by the crucible lifting device to the inlet of a distributor; and a heater for heating the crucibles installed to be communicated with the inlet of the distributor.</p> |
