发明名称 ACCESS DEVICE AND FABRICATION METHOD THEREOF, AND SEMICONDUCTOR MEMORY DEVICE HAVING THE SAME
摘要 Disclosed are an access device capable of lowering the height and efficiently controlling leakage current, and a fabrication method thereof, and a semiconductor memory device having the same. According to one embodiment of the present technique, the access device can include a first type semiconductor layer, a third type semiconductor layer formed on the first type semiconductor layer, a second type semiconductor layer formed on the third type semiconductor, a first counter doping layer for the first type semiconductor layer which is formed between the first type semiconductor layer and the third type semiconductor layer, and a second counter doping layer for the second type semiconductor layer which is formed between the third type semiconductor layer and the second type semiconductor layer.
申请公布号 KR20140026156(A) 申请公布日期 2014.03.05
申请号 KR20120093197 申请日期 2012.08.24
申请人 SK HYNIX INC. 发明人 LEE, YOUNG HO;LEE, KEUM BUM;LEE, MIN YONG;LEE, HYUNG SUK;BAEK, SEUNG BEOM
分类号 H01L27/115;H01L21/8247 主分类号 H01L27/115
代理机构 代理人
主权项
地址