APPARATUS FOR MEASURING THERMAL DISTRIBUTION OF INFRARED IMAGE SENSOR

摘要

The present invention relates to an apparatus for measuring heat distribution of an infrared image sensor unit pixel in a contactless method by applying an infrared ray light or an electrical signal to an infrared image sensor. More specifically, one aspect of the present invention provides an apparatus for measuring heat radiation distribution of an infrared sensor, including: a first infrared sensor; a sample mounting part which is mounted with the infrared sensor, and comprises a vacuum chamber including a transparent window from a visible ray to an infrared ray wavelength band on the upper part; a light source to irradiate the visible ray to the infrared sensor; a power supply unit for generating a driving signal to cause the infrared sensor to radiate heat periodically; a detection part for detecting a light reflected from a surface of the infrared sensor; and a signal generator for synchronizing the driving signal of the detection part and the power supply unit. [Reference numerals] (100) Light source; (237) Optical distributor; (500) Power supply unit; (600) Signal generator; (AA) Image; (BB) Trigger; (CC) Photo detection lens; (DD) Collimation lens; (EE) Objective lens; (FF) Driving signal; (GG) Specimen; (HH) Vacuum chamber