| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus for driving piezoelectric element which has excellent reliability, wherein the variance in the amount of energy charged to each inductor is eliminated and thereby the discharge quantity of a liquid is constantly maintained in a proper state, and a coating apparatus. <P>SOLUTION: The apparatus for driving the piezoelectric element to suck and discharge the liquid by the elongation and contraction operation accompanying the charge and discharge of a plurality of piezoelectric elements 6 includes a plurality of the inductors 11 for charging energization energy to each piezoelectric element 6, wherein the plurality of the inductors 11 are magnetically not coupled to each other. <P>COPYRIGHT: (C)2011,JPO&INPIT |
