发明名称 |
METHOD FOR PRODUCING WATER-RESISTANT ALUMINUM NITRIDE |
摘要 |
<p>The present invention relates to a method of manufacturing water resistant aluminum nitride powder, the method comprises; in a solvent, performing phosphoric acid compound treatment in which at least one phosphoric acid compound selected from the group consisting of phosphoric acid, metal salts of phosphoric acid and organic phosphoric acid having an organic group with 12 or less carbon atoms is contacted with aluminum nitride powder dispersed in the solvent so that the ratio of median diameter/primary particle diameter is 1.4 to 5, thereby the phosphoric acid compound is present on the surface of the aluminum nitride powder at a rate of 0.5 to 10 mg/m 2 in the orthophosphoric acid ion equivalence.</p> |
申请公布号 |
EP2703346(A1) |
申请公布日期 |
2014.03.05 |
申请号 |
EP20120777285 |
申请日期 |
2012.04.27 |
申请人 |
TOKUYAMA CORPORATION |
发明人 |
OHNO, HIDEKI;WANG, MENG;TAMAGAKI, MEGUMU |
分类号 |
C01B21/072;C09K5/14;H01L23/373 |
主分类号 |
C01B21/072 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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