| 摘要 |
A method for determining the presence of a sacrificial layer (41c, 41d, 41e) under a structure (40a, 40b, 40c, 40d, 40e) comprises:
providing at least one structure (40a, 40b, 40c, 40d, 40e) arranged above a substrate having a major surface lying in a plane, the at least one structure (40a, 40b, 40c, 40d, 40e) being clamped at at least one side,
exerting a force, for example mechanical force, on the at least one structure (40a, 40b, 40c, 40d, 40e), the force, for example mechanical force, having a predetermined amplitude and having a component perpendicular to the substrate,
determining the deflection of the at least one structure (40a, 40b, 40c, 40d, 40e) perpendicular to the plane of the substrate, and
correlating the deflection of the at least one structure (40a, 40b, 40c, 40d, 40e) to the presence of a sacrificial layer (41c, 41d, 41e) between the substrate and the structure (40a, 40b, 40c, 40d, 40e). |
