发明名称 NON-VOLATILE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <p>The present invention relates to a non-volatile memory device capable of improving cell properties, and a method for manufacturing the same. The non-volatile memory device includes: a tunnel insulating layer which is formed on an active region defined by device isolating layers; a polysilicon pattern which includes a first part formed on the tunnel insulating layer between the device isolation layers, and a second part protruding more than the device isolation layer from the first part and having a width narrower than the width of the first part; and a doping region which is formed on the surface of the polysilicon pattern and includes a P type dopant. [Reference numerals] (AA) Plasma doping</p>
申请公布号 KR20140026122(A) 申请公布日期 2014.03.05
申请号 KR20120093123 申请日期 2012.08.24
申请人 SK HYNIX INC. 发明人 KWAK, NOH YEAL
分类号 H01L27/115;H01L21/8247 主分类号 H01L27/115
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