| 摘要 |
The invention provides a film etching method and a laser photoetching machine, in particular to a surface protecting layer treatment method applied to a large-size touch panel and adopting laser etching. According to the invention, the film etching method comprises the following steps: forming a film on a substrate; and ablating a predetermined region of the film by utilizing a laser beam so as to form a patterning film. The laser photoetching machine comprises a laser, a focus lens group, a controller, a drive motor and a locating platform, wherein the laser beam is emitted by the laser, and the laser beam is projected on the surface of a work piece on the locating platform through the focus lens group. According to the invention, by adopting a method for directly etching on the surface of the film by the laser to form the required pattern, the film etching method and the laser photoetching machine can be used for processing the large-size touch panel without a light cover, a screen printing process or a multi-step photoetching process provided with the light cover can be replaced by a rapid single-step patterning process, and production cost is reduced. |
