| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a high-purity and high-density metal boride sintered compact suitable as a constituent material of a sputtering target, and a lanthanum boride sintered compact having the above properties. <P>SOLUTION: The method for manufacturing a metal boride sintered compact includes a step (a) for heating a metal boride powder contaminated with at least one kind of impurity selected from a metal carbide, metal oxide, metal-boron compound oxide, boron carbide and boron oxide, at a temperature of 600-800°C in the atmosphere to oxidize the impurities; a step (b) for removing the impurities by treating the heated metal boride powder obtained in the step (a) in an inorganic acid and thus eluting the oxidized impurities; and a step (c) for pressure-sintering the metal boride powder obtained in the step (b). The lanthanum boride sintered compact contains LaB<SB>6</SB>as the main component and 0.3 volume% or less of impurities except LaB<SB>6</SB>that are composed of at least two or more elements among La, C, O and B, and has a relative density of the sintered compact of 88% or higher. <P>COPYRIGHT: (C)2011,JPO&INPIT |
