Forming method and apparatus for amorphous carbon films

摘要

An amorphous carbon film forming apparatus according to the present invention is provided with a film forming furnace; plural workpiece fixtures (23) for supporting plural plate-like workpieces (22) that take a disk shape or a ring shape in a state that the same are piled up vertically in parallel, the plural workpiece fixtures (23) being arranged within the film forming furnace at a regular angular interval on a circle and being connected to a negative electrode; nozzles (31, 32) provided for supplying a processing gas and including at least one nozzle (31) arranged at a center of the circle on which the plural workpiece fixtures (23) are arranged and plural nozzles (32) arranged at a regular angular interval on another circle which surrounds the workpieces fixtures (23) radially outside thereof; and a plasma power supply connected to at least the workpiece fixtures (23). The workpiece fixtures (23) are of a type that fixes two adjoining plate-like workpieces (22) in touch at their inner and/or outer portions with a cylindrical fixture (232).