发明名称 An electronic pressure-sensing device
摘要 <p>An electronic pressure-sensing device 100 comprising a transistor 105 located on a substrate 110. The device also comprises a linker arm 115 that has a tip 120 which is configured to touch a contact region 125 of the substrate that is near the transistor. The device also comprises a pressure converter 130 that is mechanically coupled to the linker arm. The pressure converter is configured to cause, in response to a pressure change, the tip to impart a force capable of changing an electrical conductivity of the transistor. </p>
申请公布号 EP2251663(A3) 申请公布日期 2014.03.05
申请号 EP20100162776 申请日期 2010.05.13
申请人 LSI CORPORATION 发明人 HARRIS, EDWARD B.
分类号 G01L9/00;H01L29/84 主分类号 G01L9/00
代理机构 代理人
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