| 摘要 |
The present invention relates to a method for keeping pressure equalization between upper and lower plates of a flat grinder capable of high quality and high precision polishing work without single-sided wear as an even pressure is always maintained against to the entire area closely adhered to the grinder in flat polishing through adherence of the upper and lower plates, and an apparatus therefor. That is, the gist of the present invention is that a material itself has numerous pores, and a pressure equalization device (200), which includes a porous material (210) capable of ejecting a uniform pneumatic pressure evenly distributed on the entire surface of the opposite side after passing through numerous pores inside the material when a pneumatic pressure at a predetermined pressure is applied from one side as the internal passages of the pores are interwined like a labyrinth, is installed between the upper plate (100) and a driving shaft (112) of the upper part, contrary to the existing grinder in which a concentrated pressure given by the driving shaft (112) of the upper part is distributed in a metal sheet shape (the method of jetting to a metal plate has a limit in pressure equalization), in flat grinders (various kinds of grinders, polishing machines and lapping machines, usable in the overall of industries). |
