发明名称 |
Method for automated determination of an optimally parameterized scatterometry model |
摘要 |
Provided is an automated determination of an optimized parameterization of a scatterometry model for analysis of a sample diffracting structure having unknown parameters. A preprocessor determines from a plurality of floating model parameters, a reduced set of model parameters which can be reasonably floated in the scatterometry model based on a relative precision for each parameter determined from the Jacobian of measured spectral information with respect to each parameter. The relative precision for each parameter is determined in a manner which accounts for correlation between the parameters for a combination. |
申请公布号 |
US8666703(B2) |
申请公布日期 |
2014.03.04 |
申请号 |
US20100841932 |
申请日期 |
2010.07.22 |
申请人 |
FERNS JASON;HENCH JOHN J.;KOMAROV SERGUEI;DZIURA THADDEUS;TOKYO ELECTRON LIMITED;KLA-TENCOR CORPORATION |
发明人 |
FERNS JASON;HENCH JOHN J.;KOMAROV SERGUEI;DZIURA THADDEUS |
分类号 |
G06F17/50;G06F17/10;G06F19/00;G06G7/48;H03F1/26 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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