| 摘要 |
<p>A cleaning liquid is contained in a cleaning tank (3), and an object (2) to be cleaned is immersed in the cleaning liquid. A pressure reducing means (5) reduces the pressure in the cleaning tank (3) by sucking gas in the cleaning tank (3) and discharging the gas to the outside. A heating means (7) heats the cleaning liquid within the cleaning tank (3). A gas supply means (6) introduces gas into the cleaning liquid within the cleaning tank (3) from a position below the object (2) to be cleaned. After the cleaning liquid is heated to a preset temperature by the heating means (7), the pressure within the cleaning tank (3) is reduced by the pressure reducing means (5) to boil the cleaning liquid, and the gas is introduced into the cleaning liquid by the gas supply means (6) during the boiling. By this, the cleaning liquid is fiercely boiled to increase the effect of cleaning of the object (2) to be cleaned.</p> |
