发明名称 EEPROM cell
摘要 A method of forming a device is disclosed. The method includes providing a substrate prepared with a cell area and forming first and second gates of first and second transistors in the cell area. The first gate includes a second sub-gate surrounding a first sub-gate. The first and second sub-gates of the first gate are separated by a first intergate dielectric layer. The second gate includes a second sub-gate surrounding a first sub-gate. The first and second sub-gates of the second gate are separated by a second intergate dielectric layer. The method also includes forming first and second junctions of the first and second transistors. A first gate terminal is formed and coupled to the second sub-gate of the first transistor. A second gate terminal is formed and coupled to at least the first sub-gate of the second transistor.
申请公布号 US8664708(B2) 申请公布日期 2014.03.04
申请号 US201313775259 申请日期 2013.02.25
申请人 GLOBALFOUNDRIES SINGAPORE PTE. LTD. 发明人 JUNG SUNG MUN;LIM KIAN HONG;YANG JIANBO;WOO SWEE TUCK;CHU SANFORD
分类号 H01L29/76 主分类号 H01L29/76
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