| 摘要 |
An inspection method and an inspection apparatus for a transparent thin film using near infrared rays are disclosed. The inspection method for a transparent thin film comprises as follows: an infrared ray radiating step which radiates infrared rays with a wavelength of 700-2,500 nm to a transparent thin film in order to be penetrated or reflected; an image expanding step which expands the image of the transparent thin film completed with the infrared ray radiating step using an optical lens; an image sensing step which senses the image of the transparent thin film completed with the image expanding step using an image sensor; and a detecting step which detects a defect from the image of the transparent thin film. In addition, the inspection apparatus for a transparent thin film comprises: a light source unit which radiates infrared rays with a wavelength of 700-2,500 nm to a transparent thin film in order to be penetrated or reflected; an optical lens which expands the image of the transparent thin film; and an image sensor which senses the image of the transparent thin film. Therefore, in the inspection apparatus, a camera having a near infrared ray lamp light source with a wavelength of 700-2,500 nm and a near infrared ray sensing image sensor is installed in an optical microscope in order to rapidly and conveniently observe a transparent thin film such as a transparent polymer and a carbon nano-material with a simple composition. [Reference numerals] (30) 700-2500 nm near infrared ray light source unit; (60) Image sensor mounting camera |
