发明名称 Resist composition and method for producing resist pattern
摘要 A resist composition having a resin having a structural unit represented by the formula (I), a resin being insoluble or poorly soluble in alkali aqueous solution, but becoming soluble in an alkali aqueous solution by the action of an acid and not including the structural unit represented by the formula (I), and an acid generator, wherein R1, A1, R2, Rb1, Rb2, Lb1, ring Wb1, Rb3, Rb4, and Z1+ are defined in the specification.
申请公布号 US8663899(B2) 申请公布日期 2014.03.04
申请号 US201213551855 申请日期 2012.07.18
申请人 ICHIKAWA KOJI;HIRAOKA TAKASHI;SAKAMOTO HIROMU;SUMITOMO CHEMICAL COMPANY, LIMITED 发明人 ICHIKAWA KOJI;HIRAOKA TAKASHI;SAKAMOTO HIROMU
分类号 G03F7/039;G03F7/20;G03F7/30;G03F7/38 主分类号 G03F7/039
代理机构 代理人
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