Microlithographic projection illumination system, and method for producing microstructured components

摘要

The method involves depicting the sample of a structure in an image plane of a projection objective. The sample is effected by the application rate distribution of projection light in the image plane, such that the image of the structure is independent of the topography of the structure. The structure is provided within the region surrounding the structure. The regions for the structures exhibit a prescribed form and dimension.