发明名称 Semiconductor substrates with undercut structures
摘要 An intermediate semiconductor structure that comprises a substrate and at least one undercut structure formed in the substrate is disclosed. The undercut feature may include a vertical opening having a lateral cavity therein, the vertical opening extending below the lateral cavity. The lateral cavity may include faceted sidewalls.
申请公布号 US8664742(B2) 申请公布日期 2014.03.04
申请号 US20090622939 申请日期 2009.11.20
申请人 WELLS DAVID H.;MANNING H. MONTGOMERY;MICRON TECHNOLOGY, INC. 发明人 WELLS DAVID H.;MANNING H. MONTGOMERY
分类号 H01L21/70 主分类号 H01L21/70
代理机构 代理人
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