发明名称 FLAT FIELD TELECENTRIC SCANNER WITH DIFFRACTION LIMITED PERFORMANCE
摘要 The present invention provides a scanning system (100) comprising a first port for receiving or emitting a stationary beam (60) of electromagnetic radiation, a second port for emitting or receiving a scanning beam of electromagnetic radiation, the scanning beam scanning in a main scanning direction, a scanning element (61) for relaying the stationary beam (60) into the scanning beam or vice versa, an optical system between the scanning element (61) and the second port, wherein the optical system comprises at least a first mirror (63) and a second mirror (64) having a rotationally symmetric curved mirror surface around their optical axis, at least one of the first and the second curved mirror surface having an aspheric shape, and wherein the first and the second mirror (63, 64) have an off-axis decentered aperture and are offset in position in a direction perpendicular to the main scanning direction.
申请公布号 KR20140025425(A) 申请公布日期 2014.03.04
申请号 KR20137028910 申请日期 2012.03.30
申请人 NEXT SCAN TECHNOLOGY BV 发明人 DE LOOR RONNY
分类号 G02B13/00;G02B13/22;G02B26/12 主分类号 G02B13/00
代理机构 代理人
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