发明名称 |
Projection optical system, exposure apparatus, and device manufacturing method |
摘要 |
A projection optical system for forming an image of a first surface on a second surface has a first imaging optical system and a second imaging optical system, and a folding member for guiding light from the first imaging optical system to the second imaging optical system. Every optical element having a power in the second imaging optical system is a refractive element. |
申请公布号 |
US8665418(B2) |
申请公布日期 |
2014.03.04 |
申请号 |
US20080050903 |
申请日期 |
2008.03.18 |
申请人 |
OMURA YASUHIRO;NIKON CORPORATION |
发明人 |
OMURA YASUHIRO |
分类号 |
G03B27/54;G03B27/42;G03B27/52 |
主分类号 |
G03B27/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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