发明名称 FLEXIBLE SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING THE SAME, IMAGE DISPLAY DEVICE USING THE SAME, AND METHOD FOR MANUFACTURING THE IMAGE DISPLAY DEVICE
摘要 There is provided a method for manufacturing a flexible semiconductor device. The method of the flexible semiconductor device according to the present invention comprises the steps of: (i) forming an insulating layer on one of principal surfaces of a metal foil; (ii) forming a semiconductor layer on the insulating layer, and then forming source and drain electrodes so that the source and drain electrodes contact with the semiconductor layer; (iii) forming a flexible film layer so that the flexible film layer covers the semiconductor layer and the source and drain electrodes; (iv) forming vias in the flexible film layer, and thereby a semiconductor device precursor is provided; and (v) subjecting the metal foil to a processing treatment, and thereby forming a gate electrode from the metal foil, wherein, in the step (v) of the processing treatment of the metal foil, the gate electrode is formed in a predetermined position by using at least one of the vias of the semiconductor device precursor as an alignment marker.
申请公布号 KR20140024789(A) 申请公布日期 2014.03.03
申请号 KR20127022898 申请日期 2012.02.21
申请人 PANASONIC CORPORATION 发明人 SUZUKI TAKESHI;HIRANO KOICHI;MASUDA SHINOBU
分类号 H01L21/336;G09F9/00;G09F9/30;H01L21/3213;H01L21/768 主分类号 H01L21/336
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