LARGE AREA INK EJECTING APPARATUS USING SURFACE ACOUSTIC WAVE AND THE LARGE AREA THIN FILM FORMING SYSTEM HAVING THE SAME

摘要

Disclosed are a large area ink ejecting apparatus using surface acoustic waves for remarkably increasing an ejecting amount of ink in order to realize deposition of a thin film in a large area, and a large area thin film forming system including the same. According to an embodiment of the present invention, the large area ink ejecting apparatus using surface acoustic waves for ionizing ink by applying surface acoustic waves to the ink while for forming a thin film by ejecting the ionized ink toward a substrate comprises: a housing prepared to supply ink to a substrate by ejecting the ink ionized by surface acoustic waves to the upper part, and to circulate ambient gas inside by receiving the ambient gas to a lower part; an ink storage for accommodating ink by receiving the ink by passing through the lower end of the housing; a surface acoustic wave generating substrate which is generally insulation coated for generating surface acoustic waves due to the voltage applied from an outside while being dipped inside the ink storage; and a fixed member for fixing a position by dipping the surface acoustic wave generating substrate inside the ink storage by protruding from one side of the ink storage upwards.