| 摘要 |
PURPOSE: An injector of a substrate depositing apparatus and an injector assembly are provided to obtain a uniform spray flow by controlling pressure once and changing a flow direction twice or more. CONSTITUTION: A first gas distribution tank(10) stores gases from a gas source and includes a first gas distribution pipe. A second gas distribution tank(20) is connected to the lower side of the first gas distribution tank. The second gas distribution tank changes the direction of the gas supplied through the first gas distribution pipe. The second gas distribution tank sprays the gas on a substrate through a spray nozzle. |
