Apparatus for transferring substrate and apparatus for processing substrate using the same

摘要

PURPOSE: An apparatus for transferring a substrate and an apparatus for processing the substrate using the same are provided to maintain a production process in case of an emergency by selectively changing the transfer direction of a substrate. CONSTITUTION: A first roller (410) is arranged in a chamber. The first roller is rolled in a first direction. A second roller (420) is arranged in the lower part of the first roller. The second roller is rolled in a second direction. An elevating part (430) raises the second roller.