| 摘要 |
The present invention relates to an atmospheric pressure plasma treatment apparatus comprising a first electrode which is made of a metallic conductor and is supplied with positive (+) voltage; a second electrode which is disposed to face the first electrode at a certain distance, is made of a metallic conductor, and forms a space for discharge between the first electrode; a voltage supply unit which supplies voltage to the first and second electrodes; a dielectric which is formed on any of the opposed surfaces between the first and second electrodes; a process gas supply unit which injects process gas into the discharge space; and a cooling unit which has a first cooling path which passes through the first electrode and has a cooling solution flowing therein. According to the present invention, the first electrode is formed in a manner that the first cooling path having the cooling solution passes through the first electrode to maximize a contact area between the first electrode and the cooling solution and, as a result, make a high level of heat generated by the first electrode be cooled so that the cooling water flowing in the first cooling path absorbs the heat generated by the first heat to a wider contact area and discharges the heat outwards. In this manner, it is possible to prevent a decline in durability of a reactor effectively such as damage to the electrodes caused by a high amount of heat which is generated while a high level of voltage is applied to the electrodes at an atmospheric pressure to induce discharge. |
