藉由电子回旋共振使用基本电浆源以处理至少一零件的表面之方法及装置,申请号TW097139345-传众专利搜索

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发明名称	藉由电子回旋共振使用基本电浆源以处理至少一零件的表面之方法及装置
摘要
申请公布号	TWI428953	申请公布日期	2014.03.01
申请号	TW097139345	申请日期	2008.10.14
申请人	ＨＥＦ公司法国	发明人	施密特　比特;欧　克里斯多福;莫林皮瑞尔　菲力浦
分类号	H01J37/32;H05H1/46	主分类号	H01J37/32
代理机构		代理人	林志刚台北市中山区南京东路2段125号7楼
主权项
地址	法国

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