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发明名称
研磨垫及其制造方法（二）
摘要
申请公布号
TWI428362
申请公布日期
2014.03.01
申请号
TW099136736
申请日期
2010.10.27
申请人
东洋橡胶工业股份有限公司 日本
发明人
中井良之;小川一幸;中村贤治
分类号
C08G18/74;C08G18/48;C08G18/32;B24B37/24;H01L21/304
主分类号
C08G18/74
代理机构
代理人
恽轶群 台北市松山区南京东路3段248号7楼;陈文郎 台北市松山区南京东路3段248号7楼
主权项
地址
日本
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