发明名称 SEMICONDUCTOR DIE SINGULATION METHOD
摘要 In one embodiment, a semiconductor die arranges a semiconductor wafer on a corresponding carrier tape while the carrier tape is adjacent to a backside metal layer, exposes the backside metal layer in singulation lines by forming the singulation lines through the semiconductor wafer, and removing the backside metal layer from the singulation lines by fluid-processing the semiconductor wafer. Therefore, the semiconductor die is singulated from the semiconductor wafer having the backside metal layer.
申请公布号 KR20140024219(A) 申请公布日期 2014.02.28
申请号 KR20130095129 申请日期 2013.08.12
申请人 SEMICONDUCTOR COMPONENTS INDUSTRIES, L.L.C. 发明人 BURGHOUT WILLIAM F.;CONNER DENNIS LEE;SEDDON MICHAEL J.;YODER JAY A.
分类号 H01L21/301;H01L21/78 主分类号 H01L21/301
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