发明名称 VERTICAL TYPE PROBE CARD
摘要 A vertical type probe card is disclosed. The vertical type probe card includes a probe substrate; probe pins protruding from the probe substrate in a lower direction; an upper and a lower wafer of which holes are formed in the same position; and a holder structure having a slot where the upper and the lower wafer are mounted with a distance and separated from the probe substrate in the lower direction. The probe pins penetrate the holes of the upper and the lower wafer.
申请公布号 KR101366036(B1) 申请公布日期 2014.02.28
申请号 KR20120123469 申请日期 2012.11.02
申请人 LUKEN TECHNOLOGIES 发明人 AN, YUN TAE;KIM, SUK JUNG;KIM, TAE HYUN
分类号 H01L21/66;G01R1/073 主分类号 H01L21/66
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