| 摘要 |
The present invention relates to a liquid crystal modulator capable of reducing interference effects caused by vibration generated by use of an air cushion method, and an apparatus for inspecting a thin film transistor (TFT) substrate (500). The liquid crystal modulator measures a voltage supplied to pixels with an air layer with a thickness of 20-50 μm on the TFT substrate to determine whether the pixels are defective. As a substrate under the liquid crystal modulator is very thin as 20-40 μm, it was difficult to manufacture a dielectric mirror more than 13 layers due to the difference between the thermal expansion coefficients of thin films. In this case, light leaked from the dielectric mirror is reflected by the TFT substrate to cause interference to deteriorate the accuracy of measurements. According to the present invention, a light absorbing layer formed of an organic film is provided on a substrate under a liquid crystal cell to block light leaked to the TFT substrate. This structure can accurately test the TFT substrate, thereby improving productivity. |
