| 摘要 |
<p>Mixture of a first fluid and a second fluid is promoted while both the fluids are being mixed on a plurality of stages, and mixture of different types of the second fluid with the first fluid on the respective mixture stages and/or individual control of a mixed flow quantity of the second fluid with the first fluid at each of the mixture stages is enabled. In a flow channel structure, flow channels include a plurality of merging portions which penetrate from a top surface side to a back surface side of a substrate in a thickness direction, thereby merging the second fluid flowing through sub channels with the first fluid flowing through main channels, an end of each of the sub channels is disposed so as to overlap the main channel at each of positions separated apart along the direction in which the main channel extends, and each of the merging portions communicates the main channels and the ends of the sub channels with each other, thereby changing a flow direction of the second fluid flowing through the sub channels to the thickness direction of the substrate, and merges the second fluid with the first fluid flowing through the main channels.</p> |
