| 摘要 |
An apparatus for discriminating opening/closing states of a gate valve and a method for transferring a substrate by using the same are provided to prevent collision between a transfer robot and the gate valve. A gate valve opening/closing discrimination apparatus includes a gate valve sensing unit(110A) and a discrimination unit(120). The gate valve sensing unit senses opening/closing states of a gate valve(74) for opening/closing a gate slit(72) of a chamber. The discrimination unit receives sensed results from the gate valve sensing unit in order to discriminate the opening/closing states of the gate valve. The gate valve sensing unit includes a light emitting sensor and a light receiving sensor for receiving an output signal of the light emitting sensor. The light emitting sensor and the light receiving sensor are installed opposite to each other at the gate valve. |
