| 摘要 |
The supporting Member for slot sort of chamber and apparatus for treating substrate having the same are provided to improve film uniformity and the property of the film thickness and to prevent the droop phenomenon of the chamber lid. The processing chamber(100) comprises the chamber body(111), the susceptor(114) and the chamber lid(112) combined on the top of the chamber body. The O-ring(116) is interposed in contact portion of the chamber body and chamber lid(112) for the vacuum - seal. The slot port is formed at one side of the chamber body. The gate valve(160) having the slot(161) connected to the outer side surface of the chamber body(11) is combined with the slot port. The slot valve driving part(162) is connected to the bottom of the gate valve in order to operate the slot valve for opening and shutting of the slot. |
