LED TYPE PHOTOLITHOGRAPHY ILLUMINATOR HAVING HIGH LIGHT COLLECTION EFFICIENCY

摘要

PROBLEM TO BE SOLVED: To provide an LED type photolithography illuminator having high light collection efficiency.SOLUTION: A plurality of LEDs are used as an illuminator 10. Each LED has an LED die and a heat sink. The LED die is imaged on the input end 452 of a homogenizer rod 450, and covers the input end substantially without including the non-light-emitting heat sink portion of the LED. A microlens group 414 is used for imaging the LED die. Light collection efficiency of the illuminator is better than 50%, and illumination homogeneity at the output end of a light homogenizer is in the range of ±2%.