发明名称 MIRROR ARRAY
摘要 A mirror array having a total surface extending perpendicularly to a surface normal, comprises a multiplicity of mirror elements each having a reflection surface and at least one degree of freedom of displacement, wherein the totality of the mirror elements form a parqueting of a total reflection surface of the mirror array, and wherein the mirror array is embodied modularly as a tile element in such a way that the parqueting of the total reflection surface can be extended by a tiling of a plurality of such mirror arrays.
申请公布号 US2014055767(A1) 申请公布日期 2014.02.27
申请号 US201314031464 申请日期 2013.09.19
申请人 CARL ZEISS SMT GMBH 发明人 WALDIS SEVERIN;LANI SEBASTIAN;KNAUF BENEDIKT;DENG JIAN;BOSTOCK ROGER MARC
分类号 G02B26/08;G03F7/20 主分类号 G02B26/08
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