发明名称 TRANSPARENT MATERIAL TREATMENT BY ULTRA-SHORT PULSE LASER
摘要 PROBLEM TO BE SOLVED: To provide a method for the pulse laser treatment of a material.SOLUTION: A laser-based method for correcting a material comprises: a step of generating a pulse laser input beam having a pulse width shorter than about 100 ps; a step of forming a plurality of converged pulse beams having different polarizations or different wavelengths from the pulse laser input beam; a step of causing relative motions between the material and the converged pulse beams; and a step of controlling the formations and the motions so that a plurality of collinear pulse beams separated from each other in a depth direction and having different polarizations or different wavelengths may reach the material simultaneously during the motions.
申请公布号 JP2014037006(A) 申请公布日期 2014.02.27
申请号 JP20130191702 申请日期 2013.09.17
申请人 IMRA AMERICA INC 发明人 ALAN Y ARAI;CHO GYU C;XU JINGZHOU;YOSHINO IKUYO;ZHANG HAIBIN;BOVATSEK JAMES
分类号 B23K26/40;B23K26/00;B23K26/046;B23K26/06;B23K26/064;B23K26/21;B23K26/364;C03B33/09;H01L21/301 主分类号 B23K26/40
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