发明名称 |
TRANSPARENT MATERIAL TREATMENT BY ULTRA-SHORT PULSE LASER |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for the pulse laser treatment of a material.SOLUTION: A laser-based method for correcting a material comprises: a step of generating a pulse laser input beam having a pulse width shorter than about 100 ps; a step of forming a plurality of converged pulse beams having different polarizations or different wavelengths from the pulse laser input beam; a step of causing relative motions between the material and the converged pulse beams; and a step of controlling the formations and the motions so that a plurality of collinear pulse beams separated from each other in a depth direction and having different polarizations or different wavelengths may reach the material simultaneously during the motions. |
申请公布号 |
JP2014037006(A) |
申请公布日期 |
2014.02.27 |
申请号 |
JP20130191702 |
申请日期 |
2013.09.17 |
申请人 |
IMRA AMERICA INC |
发明人 |
ALAN Y ARAI;CHO GYU C;XU JINGZHOU;YOSHINO IKUYO;ZHANG HAIBIN;BOVATSEK JAMES |
分类号 |
B23K26/40;B23K26/00;B23K26/046;B23K26/06;B23K26/064;B23K26/21;B23K26/364;C03B33/09;H01L21/301 |
主分类号 |
B23K26/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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