| 摘要 |
PROBLEM TO BE SOLVED: To provide a drying device for a glass substrate having an excellent liquid draining properties of a cleaning liquid on the glass substrate.SOLUTION: A substrate 2 after cleaning, is conveyed while tilting the substrate, a plurality of gas spray means 30A, 30B for spraying the gas 9 to the substrate 2 are moved with the substrate 2, and the air 9 is sprayed to the substrate 2 in different directions by the gas spray means 30A, 30B, respectively. |
