发明名称 Semiconductor Structure
摘要 Various embodiments provide a semiconductor structure. The semiconductor structure may include a semiconductor substrate; a via extending through the semiconductor substrate; and a capacitive structure surrounding at least a portion of the via. The capacitive structure may include a metal layer formed on the semiconductor substrate.
申请公布号 US2014054742(A1) 申请公布日期 2014.02.27
申请号 US201314011036 申请日期 2013.08.27
申请人 AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH 发明人 KATTI GURUPRASAD
分类号 H01L23/522 主分类号 H01L23/522
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