发明名称 MANUFACTURING METHOD OF THIN FILM TRANSISTOR SUBSTRATE
摘要 In a method of manufacturing a thin film transistor substrate, a gate line and a gate electrode are formed on a substrate. A gate insulating layer is formed to cover the gate line and the gate electrode. A semiconductor layer is formed on the gate insulating layer to overlap with the gate electrode. A data line, a source electrode, and a drain electrode are formed on the gate insulating layer and the semiconductor layer. A photoresist layer is formed on the data line, the source electrode, and the drain electrode. The photoresist layer is patterned, and an organic layer is formed on the substrate having the photoresist layer pattern. Then, the photoresist layer pattern is removed.
申请公布号 KR101367305(B1) 申请公布日期 2014.02.27
申请号 KR20080013945 申请日期 2008.02.15
申请人 发明人
分类号 H01L29/786 主分类号 H01L29/786
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