发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and a manufacturing method of the same, which can simply manufacture a high breakdown voltage DMOS transistor without increasing the number of processes in a manufacturing process.SOLUTION: In a semiconductor device 1 in which an HV-DMOS 2, an HV-CMOS 3 and an LV-CMOS 4 are provided on a common semiconductor substrate 5, a DMOS-P-type body region 12 is formed, which has a double-well structure which includes a low-concentration region 14 which has the same impurity concentration and the same depth with those of a deep p-type well 26 of the HV-CMOS 3, and a high-concentration region 15 which is formed in an inside region of the low-concentration region 14 and has the same impurity concentration and the same depth with those of a p-type well 50 of the LV-CMOS 4.
申请公布号 JP2014038964(A) 申请公布日期 2014.02.27
申请号 JP20120181157 申请日期 2012.08.17
申请人 ROHM CO LTD 发明人 SEKIGUCHI YUJI
分类号 H01L21/8234;H01L21/76;H01L21/8238;H01L27/088;H01L27/092 主分类号 H01L21/8234
代理机构 代理人
主权项
地址