发明名称 METHOD FOR MANUFACTURING PACKAGE, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, AND ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a package with excellent joint strength and high airtightness, a method for manufacturing an electronic device, and an electronic device.SOLUTION: A method for manufacturing a package comprises the steps of: preparing a base substrate 210 provided with a low-melting glass 270 and a lid 250; defoaming the low-melting glass 270 by heating the low-melting glass 270 at a temperature not less than a flow point under a reduced-pressure atmosphere; and superposing the lid 250 on the base substrate 210 via the low-melting glass 270 and then bonding the base substrate 210 and the lid 250 by heating the low-melting glass 270 at a temperature not less than the flow point under the reduced-pressure atmosphere.
申请公布号 JP2014038969(A) 申请公布日期 2014.02.27
申请号 JP20120181247 申请日期 2012.08.18
申请人 SEIKO EPSON CORP 发明人 KAMAKURA TOMOYUKI
分类号 H01L23/02;H01L23/08;H03H3/02;H03H9/02 主分类号 H01L23/02
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