发明名称 |
METHOD FOR MANUFACTURING PACKAGE, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, AND ELECTRONIC DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a package with excellent joint strength and high airtightness, a method for manufacturing an electronic device, and an electronic device.SOLUTION: A method for manufacturing a package comprises the steps of: preparing a base substrate 210 provided with a low-melting glass 270 and a lid 250; defoaming the low-melting glass 270 by heating the low-melting glass 270 at a temperature not less than a flow point under a reduced-pressure atmosphere; and superposing the lid 250 on the base substrate 210 via the low-melting glass 270 and then bonding the base substrate 210 and the lid 250 by heating the low-melting glass 270 at a temperature not less than the flow point under the reduced-pressure atmosphere. |
申请公布号 |
JP2014038969(A) |
申请公布日期 |
2014.02.27 |
申请号 |
JP20120181247 |
申请日期 |
2012.08.18 |
申请人 |
SEIKO EPSON CORP |
发明人 |
KAMAKURA TOMOYUKI |
分类号 |
H01L23/02;H01L23/08;H03H3/02;H03H9/02 |
主分类号 |
H01L23/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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