发明名称 GRINDING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a grinding device capable of efficiently grinding a plate like workpiece having a large diameter without using a grinding wheel having a large diameter.SOLUTION: In a grinding device (1), a holding surface (3a) of a holding table (3) forms a first inclined surface (31) formed with a rotation center of the holding table (3) set as an apex and a second inclined surface (32) which spreads from the first inclined surface (31) in a radial direction and has a steeper inclination angle than the first inclined surface (31). A grinding wheel (45) of first grinding means (4) is arranged in parallel with the first inclined surface (31), and a grinding wheel (55) of second grinding means (5) is arranged in parallel with the second inclined surface (32).
申请公布号 JP2014037020(A) 申请公布日期 2014.02.27
申请号 JP20120179704 申请日期 2012.08.14
申请人 DISCO ABRASIVE SYST LTD 发明人 URAYAMA TAKAYO
分类号 B24B7/04;B24B41/047;B24B41/06;B24B47/22;B24B49/04;H01L21/304 主分类号 B24B7/04
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